Journal article 1398 views
Air-Damped Microresonators With Enhanced Quality Factor
L. Li,
G. Brown,
D. Uttamchandani,
Lijie Li 
Journal of Microelectromechanical Systems, Volume: 15, Issue: 4, Pages: 822 - 831
Swansea University Author:
Lijie Li
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DOI (Published version): 10.1109/JMEMS.2006.879375
Abstract
Air-Damped Microresonators With Enhanced Quality Factor
| Published in: | Journal of Microelectromechanical Systems |
|---|---|
| Published: |
2006
|
| URI: | https://cronfa.swan.ac.uk/Record/cronfa20758 |
| College: |
Faculty of Science and Engineering |
|---|---|
| Issue: |
4 |
| Start Page: |
822 |
| End Page: |
831 |