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The Preparation of Titanium Dioxide Gas Sensors by the Electric Field Assisted Aerosol CVD Reaction of Titanium Isopropoxide in Toluene

Naitik Panjawi, Anupriya Naik, Michael Warwick Orcid Logo, Geoffrey Hyett, Russell Binions

Chemical Vapor Deposition, Volume: 18, Issue: 4-6, Pages: 102 - 106

Swansea University Author: Michael Warwick Orcid Logo

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DOI (Published version): 10.1002/cvde.201106973

Abstract

Thin films of titanium dioxide are deposited on gas-sensor substrates at 450 °C from the aerosol-assisted (AA)CVD of titanium isopropoxide solutions in toluene under the influence of electric fields. Electric fields are generated by applying a potential difference between the inter-digitated electro...

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Published in: Chemical Vapor Deposition
ISSN: 0948-1907
Published: 2012
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URI: https://cronfa.swan.ac.uk/Record/cronfa32777
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spelling 2017-04-03T14:00:26.4042031 v2 32777 2017-03-29 The Preparation of Titanium Dioxide Gas Sensors by the Electric Field Assisted Aerosol CVD Reaction of Titanium Isopropoxide in Toluene 9fdabb7283ffccc5898cc543305475cf 0000-0002-9028-1250 Michael Warwick Michael Warwick true false 2017-03-29 FGSEN Thin films of titanium dioxide are deposited on gas-sensor substrates at 450 °C from the aerosol-assisted (AA)CVD of titanium isopropoxide solutions in toluene under the influence of electric fields. Electric fields are generated by applying a potential difference between the inter-digitated electrodes of the gas-sensor substrate during the deposition. The deposited films are analyzed and characterized using scanning electron microscopy (SEM), X-ray diffraction (XRD), and Raman spectroscopy (RS). It is found that an increase in electric field strength during deposition causes changes in the film microstructure, preferential orientation, and growth rate. The gas-sensor properties of the films are also examined. It is found that applying an electric field during the deposition improves the film microstructure and leads to a two-fold enhancement in the sensing properties of the film. Journal Article Chemical Vapor Deposition 18 4-6 102 106 0948-1907 AACVD; Electric field; Gas sensor; Titanium dioxide 31 12 2012 2012-12-31 10.1002/cvde.201106973 http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&amp;SrcAuth=ORCID&amp;SrcApp=OrcidOrg&amp;DestLinkType=FullRecord&amp;DestApp=WOS_CPL&amp;KeyUT=WOS:000304861000005&amp;KeyUID=WOS:000304861000005 COLLEGE NANME Science and Engineering - Faculty COLLEGE CODE FGSEN Swansea University 2017-04-03T14:00:26.4042031 2017-03-29T09:53:07.8740311 Faculty of Science and Engineering School of Engineering and Applied Sciences - Uncategorised Naitik Panjawi 1 Anupriya Naik 2 Michael Warwick 0000-0002-9028-1250 3 Geoffrey Hyett 4 Russell Binions 5
title The Preparation of Titanium Dioxide Gas Sensors by the Electric Field Assisted Aerosol CVD Reaction of Titanium Isopropoxide in Toluene
spellingShingle The Preparation of Titanium Dioxide Gas Sensors by the Electric Field Assisted Aerosol CVD Reaction of Titanium Isopropoxide in Toluene
Michael Warwick
title_short The Preparation of Titanium Dioxide Gas Sensors by the Electric Field Assisted Aerosol CVD Reaction of Titanium Isopropoxide in Toluene
title_full The Preparation of Titanium Dioxide Gas Sensors by the Electric Field Assisted Aerosol CVD Reaction of Titanium Isopropoxide in Toluene
title_fullStr The Preparation of Titanium Dioxide Gas Sensors by the Electric Field Assisted Aerosol CVD Reaction of Titanium Isopropoxide in Toluene
title_full_unstemmed The Preparation of Titanium Dioxide Gas Sensors by the Electric Field Assisted Aerosol CVD Reaction of Titanium Isopropoxide in Toluene
title_sort The Preparation of Titanium Dioxide Gas Sensors by the Electric Field Assisted Aerosol CVD Reaction of Titanium Isopropoxide in Toluene
author_id_str_mv 9fdabb7283ffccc5898cc543305475cf
author_id_fullname_str_mv 9fdabb7283ffccc5898cc543305475cf_***_Michael Warwick
author Michael Warwick
author2 Naitik Panjawi
Anupriya Naik
Michael Warwick
Geoffrey Hyett
Russell Binions
format Journal article
container_title Chemical Vapor Deposition
container_volume 18
container_issue 4-6
container_start_page 102
publishDate 2012
institution Swansea University
issn 0948-1907
doi_str_mv 10.1002/cvde.201106973
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Engineering and Applied Sciences - Uncategorised{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Engineering and Applied Sciences - Uncategorised
url http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&amp;SrcAuth=ORCID&amp;SrcApp=OrcidOrg&amp;DestLinkType=FullRecord&amp;DestApp=WOS_CPL&amp;KeyUT=WOS:000304861000005&amp;KeyUID=WOS:000304861000005
document_store_str 0
active_str 0
description Thin films of titanium dioxide are deposited on gas-sensor substrates at 450 °C from the aerosol-assisted (AA)CVD of titanium isopropoxide solutions in toluene under the influence of electric fields. Electric fields are generated by applying a potential difference between the inter-digitated electrodes of the gas-sensor substrate during the deposition. The deposited films are analyzed and characterized using scanning electron microscopy (SEM), X-ray diffraction (XRD), and Raman spectroscopy (RS). It is found that an increase in electric field strength during deposition causes changes in the film microstructure, preferential orientation, and growth rate. The gas-sensor properties of the films are also examined. It is found that applying an electric field during the deposition improves the film microstructure and leads to a two-fold enhancement in the sensing properties of the film.
published_date 2012-12-31T03:40:17Z
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score 11.036334

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