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Synthesis of aluminium and gallium fluoroalkoxide compounds and the low pressure metal-organic chemical vapor deposition of gallium oxide films

L Miinea, SG Suh, SG Bott, JR Liu, WK Chu, DM Hoffman, Simon Bott Orcid Logo

Journal of Materials Chemistry, Volume: 9, Issue: 4, Pages: 929 - 935

Swansea University Author: Simon Bott Orcid Logo

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DOI (Published version): 10.1039/a808460b

Published in: Journal of Materials Chemistry
ISSN: 09599428 13645501
Published: 1999
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College: College of Science
Issue: 4
Start Page: 929
End Page: 935