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Formation of 10 nm Si structures using size-selected metal clusters

Tetsuya Tada, Toshihiko Kanayama, Kenji Koga, Pascal Weibel, Simon J Carroll, Katrin Seeger, Richard Palmer Orcid Logo

Journal of Physics D: Applied Physics, Volume: 31, Issue: 7, Pages: L21 - L24

Swansea University Author: Richard Palmer Orcid Logo

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Published in: Journal of Physics D: Applied Physics
ISSN: 0022-3727 1361-6463
Published: 1998
Online Access: Check full text

URI: https://cronfa.swan.ac.uk/Record/cronfa49490
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College: College of Engineering
Issue: 7
Start Page: L21
End Page: L24