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Dielectric function of sub-10 nanometer thick gold films

Ze Mei, Shuo Deng, Lijie Li Orcid Logo, Xiaoyan Wen, Haifei Lu, Min Li

Applied Physics A, Volume: 127, Issue: 6

Swansea University Author: Lijie Li Orcid Logo

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DOI (Published version): 10.1007/s00339-021-04595-6

Abstract

A smooth gold (Au) film with thickness below 10 nanometer (nm) is hard to fabricate as well as to accurately measure its thickness and the corresponding dielectric function. Here, we report 5.4, 6.6 and 7.5 nm thick continuous Au films prepared on Chromium (Cr) seed layer. The thickness and dielectr...

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Published in: Applied Physics A
ISSN: 0947-8396 1432-0630
Published: Springer Science and Business Media LLC 2021
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URI: https://cronfa.swan.ac.uk/Record/cronfa56933
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first_indexed 2021-05-20T22:52:27Z
last_indexed 2021-06-22T03:21:23Z
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spelling 2021-06-21T16:04:19.2474916 v2 56933 2021-05-20 Dielectric function of sub-10 nanometer thick gold films ed2c658b77679a28e4c1dcf95af06bd6 0000-0003-4630-7692 Lijie Li Lijie Li true false 2021-05-20 EEEG A smooth gold (Au) film with thickness below 10 nanometer (nm) is hard to fabricate as well as to accurately measure its thickness and the corresponding dielectric function. Here, we report 5.4, 6.6 and 7.5 nm thick continuous Au films prepared on Chromium (Cr) seed layer. The thickness and dielectric function of the Au films are obtained using spectroscopic ellipsometry and first principles calculation. From the fitting results of the ellipsometric parameters, the value of the real part of dielectric function (ε1) is negative almost in the whole spectrum region indicating that the Au films are continuous. For the imaginary part of dielectric function (ε2), it decreases with increasing of the Au film thickness because the surface electrons scattering decreases. Moreover, the calculated and measured results of 5.4, 6.6 and 7.5 nm thick Au films present a good agreement in the wavelength range from 400 to 1600 nm. From the results of the first principles calculation, both ε1 and ε2 decrease with increasing of the Au film thickness. These precise measurement and calculation results of dielectric function are beneficial to nano-photoelectronic devices design with sub-10 nm Au films involved. Journal Article Applied Physics A 127 6 Springer Science and Business Media LLC 0947-8396 1432-0630 Sub-10 nm thick au flm; Dielectric function; Spectroscopic ellipsometry; First principles calculation 20 5 2021 2021-05-20 10.1007/s00339-021-04595-6 COLLEGE NANME Electronic and Electrical Engineering COLLEGE CODE EEEG Swansea University 2021-06-21T16:04:19.2474916 2021-05-20T23:50:00.3547403 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering Ze Mei 1 Shuo Deng 2 Lijie Li 0000-0003-4630-7692 3 Xiaoyan Wen 4 Haifei Lu 5 Min Li 6 56933__20067__176b838c32ab4693b2f797b930192afb.pdf 56933.pdf 2021-06-07T11:28:06.6822093 Output 947665 application/pdf Accepted Manuscript true 2022-05-20T00:00:00.0000000 true eng http://creativecommons.org/licenses/by-nc-nd/4.0/
title Dielectric function of sub-10 nanometer thick gold films
spellingShingle Dielectric function of sub-10 nanometer thick gold films
Lijie Li
title_short Dielectric function of sub-10 nanometer thick gold films
title_full Dielectric function of sub-10 nanometer thick gold films
title_fullStr Dielectric function of sub-10 nanometer thick gold films
title_full_unstemmed Dielectric function of sub-10 nanometer thick gold films
title_sort Dielectric function of sub-10 nanometer thick gold films
author_id_str_mv ed2c658b77679a28e4c1dcf95af06bd6
author_id_fullname_str_mv ed2c658b77679a28e4c1dcf95af06bd6_***_Lijie Li
author Lijie Li
author2 Ze Mei
Shuo Deng
Lijie Li
Xiaoyan Wen
Haifei Lu
Min Li
format Journal article
container_title Applied Physics A
container_volume 127
container_issue 6
publishDate 2021
institution Swansea University
issn 0947-8396
1432-0630
doi_str_mv 10.1007/s00339-021-04595-6
publisher Springer Science and Business Media LLC
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering
document_store_str 1
active_str 0
description A smooth gold (Au) film with thickness below 10 nanometer (nm) is hard to fabricate as well as to accurately measure its thickness and the corresponding dielectric function. Here, we report 5.4, 6.6 and 7.5 nm thick continuous Au films prepared on Chromium (Cr) seed layer. The thickness and dielectric function of the Au films are obtained using spectroscopic ellipsometry and first principles calculation. From the fitting results of the ellipsometric parameters, the value of the real part of dielectric function (ε1) is negative almost in the whole spectrum region indicating that the Au films are continuous. For the imaginary part of dielectric function (ε2), it decreases with increasing of the Au film thickness because the surface electrons scattering decreases. Moreover, the calculated and measured results of 5.4, 6.6 and 7.5 nm thick Au films present a good agreement in the wavelength range from 400 to 1600 nm. From the results of the first principles calculation, both ε1 and ε2 decrease with increasing of the Au film thickness. These precise measurement and calculation results of dielectric function are beneficial to nano-photoelectronic devices design with sub-10 nm Au films involved.
published_date 2021-05-20T04:12:16Z
_version_ 1763753838922170368
score 11.016258

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