On the nonlinear dynamics of a piezoresistive based mass switch based on catastrophic bifurcation

Azizishirvanshahi, Saber Azizi; Madinei, Hadi; Khodaparast, Hamed Haddad; Faroughi, Shirko; Friswell, Michael

doi:10.1007/s10999-023-09650-z

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On the nonlinear dynamics of a piezoresistive based mass switch based on catastrophic bifurcation

Saber Azizi Azizishirvanshahi, Hadi Madinei

, Hamed Haddad Khodaparast

, Shirko Faroughi, Michael Friswell

International Journal of Mechanics and Materials in Design, Volume: 19

Swansea University Authors: Saber Azizi Azizishirvanshahi, Hadi Madinei , Hamed Haddad Khodaparast , Michael Friswell

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DOI (Published version): 10.1007/s10999-023-09650-z

Abstract

This research investigates the feasibility of mass sensing in piezoresistive MEMS devices based on catastrophic bifurcation and sensitivity enhancement due to the orientation adjustment of the device with respect to the crystallographic orientation of the silicon wafer. The model studied is a cantil...

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Published in:	International Journal of Mechanics and Materials in Design
ISSN:	1569-1713 1573-8841
Published:	Springer Science and Business Media LLC 2023
Online Access:	Check full text
URI:	https://cronfa.swan.ac.uk/Record/cronfa62594
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first_indexed	2023-02-07T09:57:35Z
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The model studied is a cantilever microbeam at the end of which an electrostatically actuated tip mass is attached. The piezoresistive layers are bonded to the vicinity of the clamped end of the cantilever and the device is set to operate in the resonance regime by means of harmonic electrostatic excitation. The nonlinearities due to curvature, shortening and electrostatic excitation have been considered in the modelling process. It is shown that once the mass is deposited on the tip mass, the system undergoes a cyclic fold bifurcation in the frequency domain, which yields a sudden jump in the output voltage of the piezoresistive layers; this bifurcation is attributed to the nonlinearities governing the dynamics of the response. The partial differential equations of the motion are derived and discretized to give a finite degree of freedom model based on the Galerkin method, and the limit cycles are captured in the frequency domain by using the shooting method. The effect of the orientation of the device with respect to the crystallographic coordinates of the silicon and the effect of the orientation of the piezoresistive layers with respect to the microbeam length on the sensitivity of the device is also investigated. Thanks to the nonlinearity and the orientation adjustment of the device and piezoresistive layers, a twofold sensitivity enhancement due to the added mass was achieved. This achievement is due to the combined amplification of the sensitivity in the vicinity of the bifurcation point, which is attributed to the nonlinearity and maximizing the sensitivity by orientation adjustment of the anisotropic piezoresistive coefficients.</abstract><type>Journal Article</type><journal>International Journal of Mechanics and Materials in Design</journal><volume>19</volume><journalNumber/><paginationStart/><paginationEnd/><publisher>Springer Science and Business Media LLC</publisher><placeOfPublication/><isbnPrint/><isbnElectronic/><issnPrint>1569-1713</issnPrint><issnElectronic>1573-8841</issnElectronic><keywords>Mass sensor; Nonlinearity; Piezo resistivity; Bifurcation; Sensitivity; Cantilever</keywords><publishedDay>14</publishedDay><publishedMonth>2</publishedMonth><publishedYear>2023</publishedYear><publishedDate>2023-02-14</publishedDate><doi>10.1007/s10999-023-09650-z</doi><url/><notes/><college>COLLEGE NANME</college><department>Aerospace Engineering</department><CollegeCode>COLLEGE CODE</CollegeCode><DepartmentCode>AERO</DepartmentCode><institution>Swansea University</institution><apcterm>SU Library paid the OA fee (TA Institutional Deal)</apcterm><funders>Swansea University</funders><projectreference/><lastEdited>2023-09-04T17:30:30.8255595</lastEdited><Created>2023-02-07T09:55:07.0886050</Created><path><level id="1">Faculty of Science and Engineering</level><level id="2">School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Aerospace Engineering</level></path><authors><author><firstname>Saber Azizi</firstname><surname>Azizishirvanshahi</surname><order>1</order></author><author><firstname>Hadi</firstname><surname>Madinei</surname><orcid>0000-0002-3401-1467</orcid><order>2</order></author><author><firstname>Hamed</firstname><surname>Haddad Khodaparast</surname><orcid>0000-0002-3721-4980</orcid><order>3</order></author><author><firstname>Shirko</firstname><surname>Faroughi</surname><order>4</order></author><author><firstname>Michael</firstname><surname>Friswell</surname><order>5</order></author></authors><documents><document><filename>62594__26654__f271f2c0e8c04e0d8b3a2528d448fafa.pdf</filename><originalFilename>62594.pdf</originalFilename><uploaded>2023-02-22T10:04:57.4253757</uploaded><type>Output</type><contentLength>2055806</contentLength><contentType>application/pdf</contentType><version>Version of Record</version><cronfaStatus>true</cronfaStatus><documentNotes>© The Author(s) 2023. 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spelling	v2 62594 2023-02-07 On the nonlinear dynamics of a piezoresistive based mass switch based on catastrophic bifurcation d69732e7f5a3b101651f3654bf7175d0 Saber Azizi Azizishirvanshahi Saber Azizi Azizishirvanshahi true false d9a10856ae9e6a71793eab2365cff8b6 0000-0002-3401-1467 Hadi Madinei Hadi Madinei true false f207b17edda9c4c3ea074cbb7555efc1 0000-0002-3721-4980 Hamed Haddad Khodaparast Hamed Haddad Khodaparast true false 5894777b8f9c6e64bde3568d68078d40 Michael Friswell Michael Friswell true false 2023-02-07 AERO This research investigates the feasibility of mass sensing in piezoresistive MEMS devices based on catastrophic bifurcation and sensitivity enhancement due to the orientation adjustment of the device with respect to the crystallographic orientation of the silicon wafer. The model studied is a cantilever microbeam at the end of which an electrostatically actuated tip mass is attached. The piezoresistive layers are bonded to the vicinity of the clamped end of the cantilever and the device is set to operate in the resonance regime by means of harmonic electrostatic excitation. The nonlinearities due to curvature, shortening and electrostatic excitation have been considered in the modelling process. It is shown that once the mass is deposited on the tip mass, the system undergoes a cyclic fold bifurcation in the frequency domain, which yields a sudden jump in the output voltage of the piezoresistive layers; this bifurcation is attributed to the nonlinearities governing the dynamics of the response. The partial differential equations of the motion are derived and discretized to give a finite degree of freedom model based on the Galerkin method, and the limit cycles are captured in the frequency domain by using the shooting method. The effect of the orientation of the device with respect to the crystallographic coordinates of the silicon and the effect of the orientation of the piezoresistive layers with respect to the microbeam length on the sensitivity of the device is also investigated. Thanks to the nonlinearity and the orientation adjustment of the device and piezoresistive layers, a twofold sensitivity enhancement due to the added mass was achieved. This achievement is due to the combined amplification of the sensitivity in the vicinity of the bifurcation point, which is attributed to the nonlinearity and maximizing the sensitivity by orientation adjustment of the anisotropic piezoresistive coefficients. Journal Article International Journal of Mechanics and Materials in Design 19 Springer Science and Business Media LLC 1569-1713 1573-8841 Mass sensor; Nonlinearity; Piezo resistivity; Bifurcation; Sensitivity; Cantilever 14 2 2023 2023-02-14 10.1007/s10999-023-09650-z COLLEGE NANME Aerospace Engineering COLLEGE CODE AERO Swansea University SU Library paid the OA fee (TA Institutional Deal) Swansea University 2023-09-04T17:30:30.8255595 2023-02-07T09:55:07.0886050 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Aerospace Engineering Saber Azizi Azizishirvanshahi 1 Hadi Madinei 0000-0002-3401-1467 2 Hamed Haddad Khodaparast 0000-0002-3721-4980 3 Shirko Faroughi 4 Michael Friswell 5 62594__26654__f271f2c0e8c04e0d8b3a2528d448fafa.pdf 62594.pdf 2023-02-22T10:04:57.4253757 Output 2055806 application/pdf Version of Record true © The Author(s) 2023. Distributed under the terms of a Creative Commons Attribution 4.0 License (CC BY 4.0). true eng http://creativecommons.org/licenses/by/4.0/
title	On the nonlinear dynamics of a piezoresistive based mass switch based on catastrophic bifurcation
spellingShingle	On the nonlinear dynamics of a piezoresistive based mass switch based on catastrophic bifurcation Saber Azizi Azizishirvanshahi Hadi Madinei Hamed Haddad Khodaparast Michael Friswell
title_short	On the nonlinear dynamics of a piezoresistive based mass switch based on catastrophic bifurcation
title_full	On the nonlinear dynamics of a piezoresistive based mass switch based on catastrophic bifurcation
title_fullStr	On the nonlinear dynamics of a piezoresistive based mass switch based on catastrophic bifurcation
title_full_unstemmed	On the nonlinear dynamics of a piezoresistive based mass switch based on catastrophic bifurcation
title_sort	On the nonlinear dynamics of a piezoresistive based mass switch based on catastrophic bifurcation
author_id_str_mv	d69732e7f5a3b101651f3654bf7175d0 d9a10856ae9e6a71793eab2365cff8b6 f207b17edda9c4c3ea074cbb7555efc1 5894777b8f9c6e64bde3568d68078d40
author_id_fullname_str_mv	d69732e7f5a3b101651f3654bf7175d0_*_Saber Azizi Azizishirvanshahi d9a10856ae9e6a71793eab2365cff8b6__Hadi Madinei f207b17edda9c4c3ea074cbb7555efc1__Hamed Haddad Khodaparast 5894777b8f9c6e64bde3568d68078d40_*_Michael Friswell
author	Saber Azizi Azizishirvanshahi Hadi Madinei Hamed Haddad Khodaparast Michael Friswell
author2	Saber Azizi Azizishirvanshahi Hadi Madinei Hamed Haddad Khodaparast Shirko Faroughi Michael Friswell
format	Journal article
container_title	International Journal of Mechanics and Materials in Design
container_volume	19
publishDate	2023
institution	Swansea University
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doi_str_mv	10.1007/s10999-023-09650-z
publisher	Springer Science and Business Media LLC
college_str	Faculty of Science and Engineering
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department_str	School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Aerospace Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Aerospace Engineering
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description	This research investigates the feasibility of mass sensing in piezoresistive MEMS devices based on catastrophic bifurcation and sensitivity enhancement due to the orientation adjustment of the device with respect to the crystallographic orientation of the silicon wafer. The model studied is a cantilever microbeam at the end of which an electrostatically actuated tip mass is attached. The piezoresistive layers are bonded to the vicinity of the clamped end of the cantilever and the device is set to operate in the resonance regime by means of harmonic electrostatic excitation. The nonlinearities due to curvature, shortening and electrostatic excitation have been considered in the modelling process. It is shown that once the mass is deposited on the tip mass, the system undergoes a cyclic fold bifurcation in the frequency domain, which yields a sudden jump in the output voltage of the piezoresistive layers; this bifurcation is attributed to the nonlinearities governing the dynamics of the response. The partial differential equations of the motion are derived and discretized to give a finite degree of freedom model based on the Galerkin method, and the limit cycles are captured in the frequency domain by using the shooting method. The effect of the orientation of the device with respect to the crystallographic coordinates of the silicon and the effect of the orientation of the piezoresistive layers with respect to the microbeam length on the sensitivity of the device is also investigated. Thanks to the nonlinearity and the orientation adjustment of the device and piezoresistive layers, a twofold sensitivity enhancement due to the added mass was achieved. This achievement is due to the combined amplification of the sensitivity in the vicinity of the bifurcation point, which is attributed to the nonlinearity and maximizing the sensitivity by orientation adjustment of the anisotropic piezoresistive coefficients.
published_date	2023-02-14T17:30:32Z
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score	11.012678

On the nonlinear dynamics of a piezoresistive based mass switch based on catastrophic bifurcation

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