Test Structures for Characterizing the Integration of EWOD and SAW Technologies for Microfluidics

Li,  Yifan; Fu, R. Y.; Winters, D.; Flynn, B. W.; Parkes, B.; Brodie, D. S.; Liu,  Yufei; Terry, J.; Haworth, L. I.; Bunting, A. S.; M., J. T.; Smith, S.; Mackay, C. L.; R., P. R.; Stokes, A. A.; Walton, A. J.; Liu, Yufei

doi:10.1109/TSM.2012.2202770

Journal article 303 views

Test Structures for Characterizing the Integration of EWOD and SAW Technologies for Microfluidics

Yifan Li, R. Y. Fu, D. Winters, B. W. Flynn, B. Parkes, D. S. Brodie, Yufei Liu, J. Terry, L. I. Haworth, A. S. Bunting, J. T. M. Stevenson, S. Smith, C. L. Mackay, P. R. R. Langridge-Smith, A. A. Stokes, A. J. Walton, Yufei Liu

IEEE Transactions on Semiconductor Manufacturing, Volume: 25, Issue: 3, Pages: 323 - 330

Swansea University Author: Yufei Liu

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DOI (Published version): 10.1109/TSM.2012.2202770

Published in:	IEEE Transactions on Semiconductor Manufacturing
Published:	2012
URI:	https://cronfa.swan.ac.uk/Record/cronfa18343
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College:	Faculty of Science and Engineering
Issue:	3
Start Page:	323
End Page:	330

Test Structures for Characterizing the Integration of EWOD and SAW Technologies for Microfluidics

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