MEMS actuators for aligning and tuning optical micro cavities on atom chips
| Date first appeared online | |
| DOI | |
| Authors | Eriksson S. |
| Journal Name | Institution of Engineering and Technology Seminar on MEMS Sensors and Actuators, ICEPT |
| Volume |
| Date first appeared online | |
| DOI | |
| Authors | Eriksson S. |
| Journal Name | Institution of Engineering and Technology Seminar on MEMS Sensors and Actuators, ICEPT |
| Volume |