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A three-dimensional electrostatic actuator with a locking mechanism for microcavities on atom chips / C O Gollasch; Z Moktadir; M Kraft; M Trupke; S Eriksson; E A Hinds; Stefan Eriksson
Journal of Micromechanics and Microengineering, Volume: 15, Issue: 7, Pages: S39 - S46
Swansea University Author: Stefan, Eriksson
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DOI (Published version): 10.1088/0960-1317/15/7/006
A three-dimensional electrostatic actuator with a locking mechanism for microcavities on atom chips
|Published in:||Journal of Micromechanics and Microengineering|
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