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Design, simulation and characterization of a MEMS optical scanner

Lijie Li Orcid Logo, Mark Begbie, Gordon Brown, Deepak Uttamchandani

Journal of Micromechanics and Microengineering, Volume: 17, Issue: 9, Pages: 1781 - 1787

Swansea University Author: Lijie Li Orcid Logo

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DOI (Published version): 10.1088/0960-1317/17/9/005

Published in: Journal of Micromechanics and Microengineering
Published: 2007
URI: https://cronfa.swan.ac.uk/Record/cronfa20755
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College: Faculty of Science and Engineering
Issue: 9
Start Page: 1781
End Page: 1787