Journal article 1405 views
External linearisation of a MEMS electrothermal scanner with application in a confocal microscope
Micro & Nano Letters
Swansea University Author:
Lijie Li
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DOI (Published version): 10.1049/mnl.2009.0018
Abstract
External linearisation of a MEMS electrothermal scanner with application in a confocal microscope
| Published in: | Micro & Nano Letters |
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| Published: |
2009
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa6080 |
| College: |
Faculty of Science and Engineering |
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