Journal article 1454 views
A Design Approach to 2-D Electrostatic Torsional Micromirrors With Z-Axis Displacement Compensation
Lijie Li 
,
Mark Begbie
,
Mark Begbie
IEEE Photonics Technology Letters, Volume: 18, Issue: 22, Pages: 2422 - 2424
Swansea University Author:
Lijie Li
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DOI (Published version): 10.1109/LPT.2006.886135
Abstract
A Design Approach to 2-D Electrostatic Torsional Micromirrors With Z-Axis Displacement Compensation
| Published in: | IEEE Photonics Technology Letters |
|---|---|
| Published: |
2006
|
| URI: | https://cronfa.swan.ac.uk/Record/cronfa20756 |
| College: |
Faculty of Science and Engineering |
|---|---|
| Issue: |
22 |
| Start Page: |
2422 |
| End Page: |
2424 |