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Integrated Self-Assembling and Holding Technique Applied to a 3-D MEMS Variable Optical Attenuator

L. Li, J. Zawadzka, D. Uttamchandani, Lijie Li Orcid Logo

Journal of Microelectromechanical Systems, Volume: 13, Issue: 1, Pages: 83 - 90

Swansea University Author: Lijie Li Orcid Logo

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DOI (Published version): 10.1109/JMEMS.2003.823222

Published in: Journal of Microelectromechanical Systems
Published: 2004
URI: https://cronfa.swan.ac.uk/Record/cronfa26520
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first_indexed 2016-02-28T01:57:50Z
last_indexed 2018-02-09T05:08:35Z
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spelling 2016-02-27T20:43:20.8770999 v2 26520 2016-02-27 Integrated Self-Assembling and Holding Technique Applied to a 3-D MEMS Variable Optical Attenuator ed2c658b77679a28e4c1dcf95af06bd6 0000-0003-4630-7692 Lijie Li Lijie Li true false 2016-02-27 EEEG Journal Article Journal of Microelectromechanical Systems 13 1 83 90 3 3 2004 2004-03-03 10.1109/JMEMS.2003.823222 COLLEGE NANME Electronic and Electrical Engineering COLLEGE CODE EEEG Swansea University 2016-02-27T20:43:20.8770999 2016-02-27T20:43:20.8770999 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering L. Li 1 J. Zawadzka 2 D. Uttamchandani 3 Lijie Li 0000-0003-4630-7692 4
title Integrated Self-Assembling and Holding Technique Applied to a 3-D MEMS Variable Optical Attenuator
spellingShingle Integrated Self-Assembling and Holding Technique Applied to a 3-D MEMS Variable Optical Attenuator
Lijie Li
title_short Integrated Self-Assembling and Holding Technique Applied to a 3-D MEMS Variable Optical Attenuator
title_full Integrated Self-Assembling and Holding Technique Applied to a 3-D MEMS Variable Optical Attenuator
title_fullStr Integrated Self-Assembling and Holding Technique Applied to a 3-D MEMS Variable Optical Attenuator
title_full_unstemmed Integrated Self-Assembling and Holding Technique Applied to a 3-D MEMS Variable Optical Attenuator
title_sort Integrated Self-Assembling and Holding Technique Applied to a 3-D MEMS Variable Optical Attenuator
author_id_str_mv ed2c658b77679a28e4c1dcf95af06bd6
author_id_fullname_str_mv ed2c658b77679a28e4c1dcf95af06bd6_***_Lijie Li
author Lijie Li
author2 L. Li
J. Zawadzka
D. Uttamchandani
Lijie Li
format Journal article
container_title Journal of Microelectromechanical Systems
container_volume 13
container_issue 1
container_start_page 83
publishDate 2004
institution Swansea University
doi_str_mv 10.1109/JMEMS.2003.823222
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering
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published_date 2004-03-03T03:31:49Z
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score 11.01628