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Microfabrication of silicon tip structures for multiple-probe scanning tunneling microscopy

M. Bale, R. E. Palmer, Richard Palmer Orcid Logo

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Volume: 20, Issue: 1, Start page: 364

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1116/1.1447242

Published in: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
ISSN: 0734211X
Published: 2002
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URI: https://cronfa.swan.ac.uk/Record/cronfa49417
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first_indexed 2019-03-18T20:01:52Z
last_indexed 2019-03-18T20:01:52Z
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spelling 2019-03-18T14:35:15.2462261 v2 49417 2019-03-18 Microfabrication of silicon tip structures for multiple-probe scanning tunneling microscopy 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article Journal of Vacuum Science &amp; Technology B: Microelectronics and Nanometer Structures 20 1 364 0734211X 31 12 2002 2002-12-31 10.1116/1.1447242 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:35:15.2462261 2019-03-18T14:35:15.0047107 College of Engineering Engineering M. Bale 1 R. E. Palmer 2 Richard Palmer 0000-0001-8728-8083 3
title Microfabrication of silicon tip structures for multiple-probe scanning tunneling microscopy
spellingShingle Microfabrication of silicon tip structures for multiple-probe scanning tunneling microscopy
Richard Palmer
title_short Microfabrication of silicon tip structures for multiple-probe scanning tunneling microscopy
title_full Microfabrication of silicon tip structures for multiple-probe scanning tunneling microscopy
title_fullStr Microfabrication of silicon tip structures for multiple-probe scanning tunneling microscopy
title_full_unstemmed Microfabrication of silicon tip structures for multiple-probe scanning tunneling microscopy
title_sort Microfabrication of silicon tip structures for multiple-probe scanning tunneling microscopy
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 M. Bale
R. E. Palmer
Richard Palmer
format Journal article
container_title Journal of Vacuum Science &amp; Technology B: Microelectronics and Nanometer Structures
container_volume 20
container_issue 1
container_start_page 364
publishDate 2002
institution Swansea University
issn 0734211X
doi_str_mv 10.1116/1.1447242
college_str College of Engineering
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hierarchy_top_id collegeofengineering
hierarchy_top_title College of Engineering
hierarchy_parent_id collegeofengineering
hierarchy_parent_title College of Engineering
department_str Engineering{{{_:::_}}}College of Engineering{{{_:::_}}}Engineering
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active_str 0
published_date 2002-12-31T04:18:24Z
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