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Selective area oxide desorption by electron irradiation in a H2 ambient on GaAs (100)

S. J. Brown, T. M. Burke, M. P. Smith, D. A. Ritchie, M. Pepper, K. B. T. Tang, R. E. Palmer, Richard Palmer Orcid Logo

Applied Physics Letters, Volume: 74, Issue: 7, Pages: 950 - 952

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1063/1.123419

Published in: Applied Physics Letters
ISSN: 0003-6951 1077-3118
Published: 1999
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College: Faculty of Science and Engineering
Issue: 7
Start Page: 950
End Page: 952