Journal article 653 views
Selective area oxide desorption by electron irradiation in a H2 ambient on GaAs (100)
S. J. Brown,
T. M. Burke,
M. P. Smith,
D. A. Ritchie,
M. Pepper,
K. B. T. Tang,
R. E. Palmer,
Richard Palmer 
Applied Physics Letters, Volume: 74, Issue: 7, Pages: 950 - 952
Swansea University Author:
Richard Palmer
Full text not available from this repository: check for access using links below.
DOI (Published version): 10.1063/1.123419
Abstract
Selective area oxide desorption by electron irradiation in a H2 ambient on GaAs (100)
| Published in: | Applied Physics Letters |
|---|---|
| ISSN: | 0003-6951 1077-3118 |
| Published: |
1999
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| Online Access: |
Check full text
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa49476 |
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| College: |
Faculty of Science and Engineering |
|---|---|
| Issue: |
7 |
| Start Page: |
950 |
| End Page: |
952 |