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Compact sputter source for deposition of small size-selected clusters

S. G. Hall, M. B. Nielsen, A. W. Robinson, R. E. Palmer, Richard Palmer Orcid Logo

Review of Scientific Instruments, Volume: 68, Issue: 9, Pages: 3335 - 3339

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1063/1.1148293

Published in: Review of Scientific Instruments
ISSN: 0034-6748 1089-7623
Published: 1997
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URI: https://cronfa.swan.ac.uk/Record/cronfa49503
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College: College of Engineering
Issue: 9
Start Page: 3335
End Page: 3339