Journal article 595 views
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation
Review of Scientific Instruments, Volume: 76, Issue: 4, Start page: 045103
Swansea University Author: Richard Palmer
Full text not available from this repository: check for access using links below.
DOI (Published version): 10.1063/1.1869332
Abstract
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation
Published in: | Review of Scientific Instruments |
---|---|
ISSN: | 0034-6748 1089-7623 |
Published: |
2005
|
Online Access: |
Check full text
|
URI: | https://cronfa.swan.ac.uk/Record/cronfa49376 |
College: |
Faculty of Science and Engineering |
---|---|
Issue: |
4 |
Start Page: |
045103 |