Journal article 875 views
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation
Review of Scientific Instruments, Volume: 76, Issue: 4, Start page: 045103
Swansea University Author:
Richard Palmer
Full text not available from this repository: check for access using links below.
DOI (Published version): 10.1063/1.1869332
Abstract
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation
| Published in: | Review of Scientific Instruments |
|---|---|
| ISSN: | 0034-6748 1089-7623 |
| Published: |
2005
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| Online Access: |
Check full text
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa49376 |
| College: |
Faculty of Science and Engineering |
|---|---|
| Issue: |
4 |
| Start Page: |
045103 |

