Journal article 596 views
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation
Review of Scientific Instruments, Volume: 76, Issue: 4, Start page: 045103
Swansea University Author: Richard Palmer
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DOI (Published version): 10.1063/1.1869332
Abstract
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation
Published in: | Review of Scientific Instruments |
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ISSN: | 0034-6748 1089-7623 |
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2005
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Online Access: |
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URI: | https://cronfa.swan.ac.uk/Record/cronfa49376 |
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2019-03-18T14:33:55.8757089 v2 49376 2019-03-18 Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 ACEM Journal Article Review of Scientific Instruments 76 4 045103 0034-6748 1089-7623 31 12 2005 2005-12-31 10.1063/1.1869332 COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University 2019-03-18T14:33:55.8757089 2019-03-18T14:33:55.6729012 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering S. Pratontep 1 S. J. Carroll 2 C. Xirouchaki 3 M. Streun 4 R. E. Palmer 5 Richard Palmer 0000-0001-8728-8083 6 |
title |
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation |
spellingShingle |
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation Richard Palmer |
title_short |
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation |
title_full |
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation |
title_fullStr |
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation |
title_full_unstemmed |
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation |
title_sort |
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation |
author_id_str_mv |
6ae369618efc7424d9774377536ea519 |
author_id_fullname_str_mv |
6ae369618efc7424d9774377536ea519_***_Richard Palmer |
author |
Richard Palmer |
author2 |
S. Pratontep S. J. Carroll C. Xirouchaki M. Streun R. E. Palmer Richard Palmer |
format |
Journal article |
container_title |
Review of Scientific Instruments |
container_volume |
76 |
container_issue |
4 |
container_start_page |
045103 |
publishDate |
2005 |
institution |
Swansea University |
issn |
0034-6748 1089-7623 |
doi_str_mv |
10.1063/1.1869332 |
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Faculty of Science and Engineering |
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|
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
hierarchy_parent_id |
facultyofscienceandengineering |
hierarchy_parent_title |
Faculty of Science and Engineering |
department_str |
School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering |
document_store_str |
0 |
active_str |
0 |
published_date |
2005-12-31T01:59:49Z |
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1822093727042109440 |
score |
11.048302 |