Journal article 875 views
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation
Review of Scientific Instruments, Volume: 76, Issue: 4, Start page: 045103
Swansea University Author:
Richard Palmer
Full text not available from this repository: check for access using links below.
DOI (Published version): 10.1063/1.1869332
Abstract
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation
| Published in: | Review of Scientific Instruments |
|---|---|
| ISSN: | 0034-6748 1089-7623 |
| Published: |
2005
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| Online Access: |
Check full text
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa49376 |
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2019-03-18T20:01:46Z |
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2019-03-18T20:01:46Z |
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SURis |
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| spelling |
2019-03-18T14:33:55.8757089 v2 49376 2019-03-18 Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 ACEM Journal Article Review of Scientific Instruments 76 4 045103 0034-6748 1089-7623 31 12 2005 2005-12-31 10.1063/1.1869332 COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University 2019-03-18T14:33:55.8757089 2019-03-18T14:33:55.6729012 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering S. Pratontep 1 S. J. Carroll 2 C. Xirouchaki 3 M. Streun 4 R. E. Palmer 5 Richard Palmer 0000-0001-8728-8083 6 |
| title |
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation |
| spellingShingle |
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation Richard Palmer |
| title_short |
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation |
| title_full |
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation |
| title_fullStr |
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation |
| title_full_unstemmed |
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation |
| title_sort |
Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation |
| author_id_str_mv |
6ae369618efc7424d9774377536ea519 |
| author_id_fullname_str_mv |
6ae369618efc7424d9774377536ea519_***_Richard Palmer |
| author |
Richard Palmer |
| author2 |
S. Pratontep S. J. Carroll C. Xirouchaki M. Streun R. E. Palmer Richard Palmer |
| format |
Journal article |
| container_title |
Review of Scientific Instruments |
| container_volume |
76 |
| container_issue |
4 |
| container_start_page |
045103 |
| publishDate |
2005 |
| institution |
Swansea University |
| issn |
0034-6748 1089-7623 |
| doi_str_mv |
10.1063/1.1869332 |
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Faculty of Science and Engineering |
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|
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
| hierarchy_parent_id |
facultyofscienceandengineering |
| hierarchy_parent_title |
Faculty of Science and Engineering |
| department_str |
School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering |
| document_store_str |
0 |
| active_str |
0 |
| published_date |
2005-12-31T15:42:32Z |
| _version_ |
1850683532498698240 |
| score |
11.08899 |

