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Nano-machining of films deposited on H-passivated Si(111)

P Miao, A W Robinson, R E Palmer, Richard Palmer Orcid Logo

Journal of Physics D: Applied Physics, Volume: 30, Issue: 24, Pages: 3307 - 3311

Swansea University Author: Richard Palmer Orcid Logo

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Published in: Journal of Physics D: Applied Physics
ISSN: 0022-3727 1361-6463
Published: 1997
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URI: https://cronfa.swan.ac.uk/Record/cronfa49511
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College: College of Engineering
Issue: 24
Start Page: 3307
End Page: 3311