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Experimental and Theoretical Validation of Ga2O3 Thin Films Deposited by Physical Vapor Deposition / Khue Tian Lai; Nafiseh Badiei; Shuo Deng; Petar Igic; Lijie Li

2019 International Semiconductor Conference (CAS)

Swansea University Authors: Khue Tian, Lai, Nafiseh, Badiei, Shuo, Deng, Petar, Igic, Lijie, Li

Published in: 2019 International Semiconductor Conference (CAS)
ISBN: 9781728118864 9781728118888
ISSN: 1545-827X 2377-0678
Published: IEEE 2020
Online Access: Check full text

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Keywords: density functional theory; gallium oxide; optical properties; physical vapor deposition; wide band gap semiconductors
College: College of Engineering