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Scaling/LER study of Si GAA nanowire FET using 3D Finite Element Monte Carlo simulations / Muhammad A. Elmessary, Daniel Nagy, Manuel Aldegunde, Natalia Seoane, Guillermo Indalecio, Jari Lindberg, Wulf Dettmer, Djordje Peric, Antonio J. Garcia-Loureiro, Karol Kalna

2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Pages: 52 - 55

Swansea University Authors: Djordje Peric, Karol Kalna

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DOI (Published version): 10.1109/ULIS.2016.7440050

Published in: 2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)
Published: 2016
URI: https://cronfa.swan.ac.uk/Record/cronfa27208
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College: College of Engineering
Start Page: 52
End Page: 55