Conference Paper/Proceeding/Abstract 1280 views
Scaling/LER study of Si GAA nanowire FET using 3D Finite Element Monte Carlo simulations
Muhammad A. Elmessary,
Daniel Nagy,
Manuel Aldegunde,
Natalia Seoane,
Guillermo Indalecio,
Jari Lindberg,
Wulf Dettmer,
Djordje Peric 
,
Antonio J. Garcia-Loureiro,
Karol Kalna
,
Antonio J. Garcia-Loureiro,
Karol Kalna
2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Pages: 52 - 55
Swansea University Authors:
Djordje Peric , Karol Kalna
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DOI (Published version): 10.1109/ULIS.2016.7440050
Abstract
Scaling/LER study of Si GAA nanowire FET using 3D Finite Element Monte Carlo simulations
| Published in: | 2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) |
|---|---|
| Published: |
2016
|
| URI: | https://cronfa.swan.ac.uk/Record/cronfa27208 |
| Tags: |
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| College: |
Faculty of Science and Engineering |
|---|---|
| Start Page: |
52 |
| End Page: |
55 |