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Conference Paper/Proceeding/Abstract 699 views

Scaling/LER study of Si GAA nanowire FET using 3D Finite Element Monte Carlo simulations

Muhammad A. Elmessary, Daniel Nagy, Manuel Aldegunde, Natalia Seoane, Guillermo Indalecio, Jari Lindberg, Wulf Dettmer, Djordje Peric Orcid Logo, Antonio J. Garcia-Loureiro, Karol Kalna Orcid Logo

2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Pages: 52 - 55

Swansea University Authors: Djordje Peric Orcid Logo, Karol Kalna Orcid Logo

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DOI (Published version): 10.1109/ULIS.2016.7440050

Published in: 2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)
Published: 2016
URI: https://cronfa.swan.ac.uk/Record/cronfa27208
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College: College of Engineering
Start Page: 52
End Page: 55