Journal article 610 views
The Application of Electric Fields to Aerosol Assisted Chemical Vapor Deposition Reactions
Journal of The Electrochemical Society, Volume: 158, Issue: 2, Start page: D62
Swansea University Author: Michael Warwick
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DOI (Published version): 10.1149/1.3519870
Abstract
Chemical vapor deposition methodologies are widely employed in a variety of fields such as microelectronics and glazing. Control of film growth and microstructure, and hence film properties, may be limited by precursor properties such as volatility or decomposition chemistry. In this paper we report...
Published in: | Journal of The Electrochemical Society |
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ISSN: | 0013-4651 |
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2011
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URI: | https://cronfa.swan.ac.uk/Record/cronfa32782 |
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2017-04-03T14:06:57.1728088 v2 32782 2017-03-29 The Application of Electric Fields to Aerosol Assisted Chemical Vapor Deposition Reactions 9fdabb7283ffccc5898cc543305475cf 0000-0002-9028-1250 Michael Warwick Michael Warwick true false 2017-03-29 FGSEN Chemical vapor deposition methodologies are widely employed in a variety of fields such as microelectronics and glazing. Control of film growth and microstructure, and hence film properties, may be limited by precursor properties such as volatility or decomposition chemistry. In this paper we report how the incorporation of an applied electric field to aerosol assisted chemical vapor deposition reactions of vanadyl acetylacetonate in alcohols can influence the microstructure and growth of thin films of vanadium dioxide in unusual and sometimes unexpected ways. The films were characterized using scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, and Raman spectroscopy. Journal Article Journal of The Electrochemical Society 158 2 D62 0013-4651 chemical vapour deposition, crystal microstructure, Raman spectra, scanning electron microscopy, thin films, vanadium compounds, X-ray diffraction, X-ray photoelectron spectra 31 12 2011 2011-12-31 10.1149/1.3519870 http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000285765600054&KeyUID=WOS:000285765600054 COLLEGE NANME Science and Engineering - Faculty COLLEGE CODE FGSEN Swansea University 2017-04-03T14:06:57.1728088 2017-03-29T09:53:12.6009184 Faculty of Science and Engineering School of Engineering and Applied Sciences - Uncategorised Jared Crane 1 Michael Warwick 0000-0002-9028-1250 2 Richard Smith 3 Neza Furlan 4 Russell Binions 5 |
title |
The Application of Electric Fields to Aerosol Assisted Chemical Vapor Deposition Reactions |
spellingShingle |
The Application of Electric Fields to Aerosol Assisted Chemical Vapor Deposition Reactions Michael Warwick |
title_short |
The Application of Electric Fields to Aerosol Assisted Chemical Vapor Deposition Reactions |
title_full |
The Application of Electric Fields to Aerosol Assisted Chemical Vapor Deposition Reactions |
title_fullStr |
The Application of Electric Fields to Aerosol Assisted Chemical Vapor Deposition Reactions |
title_full_unstemmed |
The Application of Electric Fields to Aerosol Assisted Chemical Vapor Deposition Reactions |
title_sort |
The Application of Electric Fields to Aerosol Assisted Chemical Vapor Deposition Reactions |
author_id_str_mv |
9fdabb7283ffccc5898cc543305475cf |
author_id_fullname_str_mv |
9fdabb7283ffccc5898cc543305475cf_***_Michael Warwick |
author |
Michael Warwick |
author2 |
Jared Crane Michael Warwick Richard Smith Neza Furlan Russell Binions |
format |
Journal article |
container_title |
Journal of The Electrochemical Society |
container_volume |
158 |
container_issue |
2 |
container_start_page |
D62 |
publishDate |
2011 |
institution |
Swansea University |
issn |
0013-4651 |
doi_str_mv |
10.1149/1.3519870 |
college_str |
Faculty of Science and Engineering |
hierarchytype |
|
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
department_str |
School of Engineering and Applied Sciences - Uncategorised{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Engineering and Applied Sciences - Uncategorised |
url |
http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000285765600054&KeyUID=WOS:000285765600054 |
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description |
Chemical vapor deposition methodologies are widely employed in a variety of fields such as microelectronics and glazing. Control of film growth and microstructure, and hence film properties, may be limited by precursor properties such as volatility or decomposition chemistry. In this paper we report how the incorporation of an applied electric field to aerosol assisted chemical vapor deposition reactions of vanadyl acetylacetonate in alcohols can influence the microstructure and growth of thin films of vanadium dioxide in unusual and sometimes unexpected ways. The films were characterized using scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, and Raman spectroscopy. |
published_date |
2011-12-31T03:40:18Z |
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1763751827267911680 |
score |
11.036116 |