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Organic Hard Masks Utilizing Fullerene Derivatives
Thomas I. Wallow,
Christoph K. Hohle,
Andreas Frommhold,
Alan G. Brown,
Richard Palmer 
,
Tom Lada,
Alex P. Robinson
,
Tom Lada,
Alex P. Robinson
Swansea University Author:
Richard Palmer
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DOI (Published version): 10.1117/12.2085675
Abstract
Organic Hard Masks Utilizing Fullerene Derivatives
| Published: |
2015
|
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa49246 |
| College: |
Faculty of Science and Engineering |
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