Journal article 1329 views
Chemically amplified phenolic fullerene electron beam resist
Journal of Materials Chemistry C, Volume: 2, Issue: 8, Start page: 1505
Swansea University Author:
Richard Palmer
Full text not available from this repository: check for access using links below.
DOI (Published version): 10.1039/c3tc31896f
Abstract
Chemically amplified phenolic fullerene electron beam resist
| Published in: | Journal of Materials Chemistry C |
|---|---|
| ISSN: | 2050-7526 2050-7534 |
| Published: |
2014
|
| Online Access: |
Check full text
|
| URI: | https://cronfa.swan.ac.uk/Record/cronfa49259 |
| College: |
Faculty of Science and Engineering |
|---|---|
| Issue: |
8 |
| Start Page: |
1505 |

