Journal article 858 views
Positive tone chemically amplified fullerene resist
Mark H. Somervell,
J. Manyam,
A. Frommhold,
D. X. Yang,
A. McClelland,
M. Manickam,
J. A. Preece,
R. E. Palmer,
A. P. G. Robinson,
Thomas I. Wallow,
Richard Palmer 
Swansea University Author:
Richard Palmer
Full text not available from this repository: check for access using links below.
DOI (Published version): 10.1117/12.916472
Abstract
Positive tone chemically amplified fullerene resist
| Published: |
2012
|
|---|---|
| URI: | https://cronfa.swan.ac.uk/Record/cronfa49291 |
| College: |
Faculty of Science and Engineering |
|---|