Journal article 379 views
Fullerene Resist Materials for the 32 nm Node and Beyond
Francis P. Gibbons,
Alex P. G. Robinson,
Richard Palmer 
,
Sara Diegoli,
Mayandithevar Manickam,
Jon A. Preece
,
Sara Diegoli,
Mayandithevar Manickam,
Jon A. Preece
Advanced Functional Materials, Volume: 18, Issue: 13, Pages: 1977 - 1982
Swansea University Author:
Richard Palmer
Full text not available from this repository: check for access using links below.
DOI (Published version): 10.1002/adfm.200701155
Abstract
Fullerene Resist Materials for the 32 nm Node and Beyond
| Published in: | Advanced Functional Materials |
|---|---|
| ISSN: | 1616301X 16163028 |
| Published: |
2008
|
| Online Access: |
Check full text
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa49327 |
| Tags: |
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| College: |
Faculty of Science and Engineering |
|---|---|
| Issue: |
13 |
| Start Page: |
1977 |
| End Page: |
1982 |