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Fullerene Resist Materials for the 32 nm Node and Beyond

Francis P. Gibbons, Alex P. G. Robinson, Richard Palmer Orcid Logo, Sara Diegoli, Mayandithevar Manickam, Jon A. Preece

Advanced Functional Materials, Volume: 18, Issue: 13, Pages: 1977 - 1982

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1002/adfm.200701155

Published in: Advanced Functional Materials
ISSN: 1616301X 16163028
Published: 2008
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College: Faculty of Science and Engineering
Issue: 13
Start Page: 1977
End Page: 1982