Journal article 424 views
Fullerene Resist Materials for the 32 nm Node and Beyond
Francis P. Gibbons,
Alex P. G. Robinson,
Richard Palmer
,
Sara Diegoli,
Mayandithevar Manickam,
Jon A. Preece
Advanced Functional Materials, Volume: 18, Issue: 13, Pages: 1977 - 1982
Swansea University Author:
Richard Palmer
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DOI (Published version): 10.1002/adfm.200701155
Abstract
Fullerene Resist Materials for the 32 nm Node and Beyond
Published in: | Advanced Functional Materials |
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ISSN: | 1616301X 16163028 |
Published: |
2008
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URI: | https://cronfa.swan.ac.uk/Record/cronfa49327 |
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2019-03-18T14:32:11.9412990 v2 49327 2019-03-18 Fullerene Resist Materials for the 32 nm Node and Beyond 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article Advanced Functional Materials 18 13 1977 1982 1616301X 16163028 31 12 2008 2008-12-31 10.1002/adfm.200701155 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:32:11.9412990 2019-03-18T14:32:11.7072920 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering Francis P. Gibbons 1 Alex P. G. Robinson 2 Richard Palmer 0000-0001-8728-8083 3 Sara Diegoli 4 Mayandithevar Manickam 5 Jon A. Preece 6 |
title |
Fullerene Resist Materials for the 32 nm Node and Beyond |
spellingShingle |
Fullerene Resist Materials for the 32 nm Node and Beyond Richard Palmer |
title_short |
Fullerene Resist Materials for the 32 nm Node and Beyond |
title_full |
Fullerene Resist Materials for the 32 nm Node and Beyond |
title_fullStr |
Fullerene Resist Materials for the 32 nm Node and Beyond |
title_full_unstemmed |
Fullerene Resist Materials for the 32 nm Node and Beyond |
title_sort |
Fullerene Resist Materials for the 32 nm Node and Beyond |
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6ae369618efc7424d9774377536ea519 |
author_id_fullname_str_mv |
6ae369618efc7424d9774377536ea519_***_Richard Palmer |
author |
Richard Palmer |
author2 |
Francis P. Gibbons Alex P. G. Robinson Richard Palmer Sara Diegoli Mayandithevar Manickam Jon A. Preece |
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Journal article |
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Advanced Functional Materials |
container_volume |
18 |
container_issue |
13 |
container_start_page |
1977 |
publishDate |
2008 |
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Swansea University |
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1616301X 16163028 |
doi_str_mv |
10.1002/adfm.200701155 |
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Faculty of Science and Engineering |
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
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School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering |
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0 |
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published_date |
2008-12-31T04:00:14Z |
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1763753081915310080 |
score |
11.021648 |