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Fullerene Resist Materials for the 32 nm Node and Beyond

Francis P. Gibbons, Alex P. G. Robinson, Richard Palmer Orcid Logo, Sara Diegoli, Mayandithevar Manickam, Jon A. Preece

Advanced Functional Materials, Volume: 18, Issue: 13, Pages: 1977 - 1982

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1002/adfm.200701155

Published in: Advanced Functional Materials
ISSN: 1616301X 16163028
Published: 2008
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URI: https://cronfa.swan.ac.uk/Record/cronfa49327
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spelling 2019-03-18T14:32:11.9412990 v2 49327 2019-03-18 Fullerene Resist Materials for the 32 nm Node and Beyond 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article Advanced Functional Materials 18 13 1977 1982 1616301X 16163028 31 12 2008 2008-12-31 10.1002/adfm.200701155 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:32:11.9412990 2019-03-18T14:32:11.7072920 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering Francis P. Gibbons 1 Alex P. G. Robinson 2 Richard Palmer 0000-0001-8728-8083 3 Sara Diegoli 4 Mayandithevar Manickam 5 Jon A. Preece 6
title Fullerene Resist Materials for the 32 nm Node and Beyond
spellingShingle Fullerene Resist Materials for the 32 nm Node and Beyond
Richard Palmer
title_short Fullerene Resist Materials for the 32 nm Node and Beyond
title_full Fullerene Resist Materials for the 32 nm Node and Beyond
title_fullStr Fullerene Resist Materials for the 32 nm Node and Beyond
title_full_unstemmed Fullerene Resist Materials for the 32 nm Node and Beyond
title_sort Fullerene Resist Materials for the 32 nm Node and Beyond
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 Francis P. Gibbons
Alex P. G. Robinson
Richard Palmer
Sara Diegoli
Mayandithevar Manickam
Jon A. Preece
format Journal article
container_title Advanced Functional Materials
container_volume 18
container_issue 13
container_start_page 1977
publishDate 2008
institution Swansea University
issn 1616301X
16163028
doi_str_mv 10.1002/adfm.200701155
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 2008-12-31T04:00:14Z
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score 10.99342