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Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6

D. Riedel, J.L. Hernandez-Pozos, R.E. Palmer, K.W. Kolasinski, Richard Palmer Orcid Logo

Applied Physics A, Volume: 78, Issue: 3, Pages: 381 - 385

Swansea University Author: Richard Palmer Orcid Logo

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Published in: Applied Physics A
ISSN: 0947-8396 1432-0630
Published: 2004
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URI: https://cronfa.swan.ac.uk/Record/cronfa49385
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College: College of Engineering
Issue: 3
Start Page: 381
End Page: 385