Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6
| Date first appeared online | |
| DOI | 10.1007/s00339-002-1938-y |
| Authors | Palmer R. |
| Journal Name | Applied Physics A |
| Volume | 78 |
| Date first appeared online | |
| DOI | 10.1007/s00339-002-1938-y |
| Authors | Palmer R. |
| Journal Name | Applied Physics A |
| Volume | 78 |