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Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers

A. Wellner, P.R. Preece, J.C. Fowler, R.E. Palmer, Richard Palmer Orcid Logo

Microelectronic Engineering, Volume: 57-58, Pages: 919 - 924

Swansea University Author: Richard Palmer Orcid Logo

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Published in: Microelectronic Engineering
ISSN: 01679317
Published: 2001
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College: Faculty of Science and Engineering
Start Page: 919
End Page: 924