Journal article 892 views
Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers
A. Wellner,
P.R. Preece,
J.C. Fowler,
R.E. Palmer,
Richard Palmer 
Microelectronic Engineering, Volume: 57-58, Pages: 919 - 924
Swansea University Author:
Richard Palmer
Full text not available from this repository: check for access using links below.
DOI (Published version): 10.1016/s0167-9317(01)00457-9
Abstract
Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers
| Published in: | Microelectronic Engineering |
|---|---|
| ISSN: | 01679317 |
| Published: |
2001
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| Online Access: |
Check full text
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa49427 |
| College: |
Faculty of Science and Engineering |
|---|---|
| Start Page: |
919 |
| End Page: |
924 |