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Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers

A. Wellner, P.R. Preece, J.C. Fowler, R.E. Palmer, Richard Palmer Orcid Logo

Microelectronic Engineering, Volume: 57-58, Pages: 919 - 924

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1016/s0167-9317(01)00457-9

Published in: Microelectronic Engineering
ISSN: 01679317
Published: 2001
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URI: https://cronfa.swan.ac.uk/Record/cronfa49427
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first_indexed 2019-03-18T20:01:53Z
last_indexed 2019-03-18T20:01:53Z
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spelling 2019-03-18T14:35:35.1682277 v2 49427 2019-03-18 Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article Microelectronic Engineering 57-58 919 924 01679317 31 12 2001 2001-12-31 10.1016/s0167-9317(01)00457-9 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:35:35.1682277 2019-03-18T14:35:34.9539605 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering A. Wellner 1 P.R. Preece 2 J.C. Fowler 3 R.E. Palmer 4 Richard Palmer 0000-0001-8728-8083 5
title Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers
spellingShingle Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers
Richard Palmer
title_short Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers
title_full Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers
title_fullStr Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers
title_full_unstemmed Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers
title_sort Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 A. Wellner
P.R. Preece
J.C. Fowler
R.E. Palmer
Richard Palmer
format Journal article
container_title Microelectronic Engineering
container_volume 57-58
container_start_page 919
publishDate 2001
institution Swansea University
issn 01679317
doi_str_mv 10.1016/s0167-9317(01)00457-9
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 2001-12-31T04:00:26Z
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score 11.012678

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