No Cover Image

Journal article 377 views

Fabrication of silicon cones and pillars using rough metal films as plasma etching masks

K. Seeger, R. E. Palmer, Richard Palmer Orcid Logo

Applied Physics Letters, Volume: 74, Issue: 11, Pages: 1627 - 1629

Swansea University Author: Richard Palmer Orcid Logo

Full text not available from this repository: check for access using links below.

Check full text

DOI (Published version): 10.1063/1.123638

Published in: Applied Physics Letters
ISSN: 0003-6951 1077-3118
Published: 1999
Online Access: Check full text

Tags: Add Tag
No Tags, Be the first to tag this record!
College: Faculty of Science and Engineering
Issue: 11
Start Page: 1627
End Page: 1629