Journal article 858 views
Fabrication of silicon cones and pillars using rough metal films as plasma etching masks
K. Seeger,
R. E. Palmer,
Richard Palmer 
Applied Physics Letters, Volume: 74, Issue: 11, Pages: 1627 - 1629
Swansea University Author:
Richard Palmer
Full text not available from this repository: check for access using links below.
DOI (Published version): 10.1063/1.123638
Abstract
Fabrication of silicon cones and pillars using rough metal films as plasma etching masks
| Published in: | Applied Physics Letters |
|---|---|
| ISSN: | 0003-6951 1077-3118 |
| Published: |
1999
|
| Online Access: |
Check full text
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa49471 |
| College: |
Faculty of Science and Engineering |
|---|---|
| Issue: |
11 |
| Start Page: |
1627 |
| End Page: |
1629 |