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Fabrication of silicon cones and pillars using rough metal films as plasma etching masks

K. Seeger, R. E. Palmer, Richard Palmer Orcid Logo

Applied Physics Letters, Volume: 74, Issue: 11, Pages: 1627 - 1629

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1063/1.123638

Published in: Applied Physics Letters
ISSN: 0003-6951 1077-3118
Published: 1999
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URI: https://cronfa.swan.ac.uk/Record/cronfa49471
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College: College of Engineering
Issue: 11
Start Page: 1627
End Page: 1629