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High-Sensitivity and Fast-Response Piezotronic Pressure Sensors by Mechanical Stacking in Silicon Wafer
Gongwei Hu,
Li Zeng,
Yihan Zhang,
Yinlin Peng,
Xiaoming Dong,
Min Liu 
,
Liqing Pan,
Yong Chao,
Lijie Li ,
Wei Huang,
Fobao Huang
,
Liqing Pan,
Yong Chao,
Lijie Li ,
Wei Huang,
Fobao Huang
ACS Nano, Volume: 20, Issue: 8, Pages: 7216 - 7227
Swansea University Author:
Lijie Li
-
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Author accepted manuscript document released under the terms of a Creative Commons CC-BY licence using the Swansea University Research Publications Policy (rights retention).
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DOI (Published version): 10.1021/acsnano.5c20600
Abstract
High-Sensitivity and Fast-Response Piezotronic Pressure Sensors by Mechanical Stacking in Silicon Wafer
| Published in: | ACS Nano |
|---|---|
| ISSN: | 1936-0851 1936-086X |
| Published: |
American Chemical Society (ACS)
2026
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| Online Access: |
Check full text
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa71463 |
| Keywords: |
Piezotronic Sensors; Mechanical Stacking; Epitaxial-Free Heterogeneous Electronics; Si/GaN; High Sensitivity; Fast Response |
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| College: |
Faculty of Science and Engineering |
| Funders: |
This work was supported by the National Natural Science Foundation of China (Grant 62404125), the Natural Science Foundation of Hubei Province (Grant 2024AFB359), the Youth Talent Project of the Science and Technology Research Program of the Education Department of Hubei Province (Grant Q20241213), the Natural Science Foundation of Yichang Municipality (Grant A24-3-004), the China Three Gorges University (Grant 2023RCKJ0035), the Guangdong Basic and Applied Basic Research Foundation (Grant 2025A1515011971), and the Basic Research Programs of Taicang, 2024 (Grant TC2024JC40). |
| Issue: |
8 |
| Start Page: |
7216 |
| End Page: |
7227 |