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High-Sensitivity and Fast-Response Piezotronic Pressure Sensors by Mechanical Stacking in Silicon Wafer

Gongwei Hu, Li Zeng, Yihan Zhang, Yinlin Peng, Xiaoming Dong, Min Liu Orcid Logo, Liqing Pan, Yong Chao, Lijie Li Orcid Logo, Wei Huang, Fobao Huang Orcid Logo

ACS Nano

Swansea University Author: Lijie Li Orcid Logo

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DOI (Published version): 10.1021/acsnano.5c20600

Published in: ACS Nano
ISSN: 1936-0851 1936-086X
Published: American Chemical Society (ACS) 2026
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URI: https://cronfa.swan.ac.uk/Record/cronfa71463
first_indexed 2026-02-18T14:37:29Z
last_indexed 2026-02-20T04:23:04Z
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spelling 2026-02-18T14:37:27.6109501 v2 71463 2026-02-18 High-Sensitivity and Fast-Response Piezotronic Pressure Sensors by Mechanical Stacking in Silicon Wafer ed2c658b77679a28e4c1dcf95af06bd6 0000-0003-4630-7692 Lijie Li Lijie Li true false 2026-02-18 ACEM Journal Article ACS Nano American Chemical Society (ACS) 1936-0851 1936-086X 16 2 2026 2026-02-16 10.1021/acsnano.5c20600 https://doi.org/10.1021/acsnano.5c20600 COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University Not Required 2026-02-18T14:37:27.6109501 2026-02-18T14:28:14.6596698 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering Gongwei Hu 1 Li Zeng 2 Yihan Zhang 3 Yinlin Peng 4 Xiaoming Dong 5 Min Liu 0000-0002-6724-7521 6 Liqing Pan 7 Yong Chao 8 Lijie Li 0000-0003-4630-7692 9 Wei Huang 10 Fobao Huang 0000-0002-4791-2109 11
title High-Sensitivity and Fast-Response Piezotronic Pressure Sensors by Mechanical Stacking in Silicon Wafer
spellingShingle High-Sensitivity and Fast-Response Piezotronic Pressure Sensors by Mechanical Stacking in Silicon Wafer
Lijie Li
title_short High-Sensitivity and Fast-Response Piezotronic Pressure Sensors by Mechanical Stacking in Silicon Wafer
title_full High-Sensitivity and Fast-Response Piezotronic Pressure Sensors by Mechanical Stacking in Silicon Wafer
title_fullStr High-Sensitivity and Fast-Response Piezotronic Pressure Sensors by Mechanical Stacking in Silicon Wafer
title_full_unstemmed High-Sensitivity and Fast-Response Piezotronic Pressure Sensors by Mechanical Stacking in Silicon Wafer
title_sort High-Sensitivity and Fast-Response Piezotronic Pressure Sensors by Mechanical Stacking in Silicon Wafer
author_id_str_mv ed2c658b77679a28e4c1dcf95af06bd6
author_id_fullname_str_mv ed2c658b77679a28e4c1dcf95af06bd6_***_Lijie Li
author Lijie Li
author2 Gongwei Hu
Li Zeng
Yihan Zhang
Yinlin Peng
Xiaoming Dong
Min Liu
Liqing Pan
Yong Chao
Lijie Li
Wei Huang
Fobao Huang
format Journal article
container_title ACS Nano
publishDate 2026
institution Swansea University
issn 1936-0851
1936-086X
doi_str_mv 10.1021/acsnano.5c20600
publisher American Chemical Society (ACS)
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering
url https://doi.org/10.1021/acsnano.5c20600
document_store_str 0
active_str 0
published_date 2026-02-16T05:29:49Z
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score 11.098272

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