Conference Paper/Proceeding/Abstract 883 views
High-speed intermittent-contact mode scanning probe microscopy using cantilevers with integrated electrostatic actuator and thermoelectric sensor
D.R. Sahoo,
W. Häberle,
P. Bächtold,
A. Sebastian,
H. Pozidis,
E. Eleftheriou,
Deepak Sahoo 
Proceedings of the American Control Conference
Swansea University Author:
Deepak Sahoo
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DOI (Published version): 10.1109/ACC.2009.5160608
Abstract
High-speed intermittent-contact mode scanning probe microscopy using cantilevers with integrated electrostatic actuator and thermoelectric sensor
| Published in: | Proceedings of the American Control Conference |
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| Published: |
2009
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| Online Access: |
http://www.scopus.com/inward/record.url?eid=2-s2.0-70449650391&partnerID=MN8TOARS |
| URI: | https://cronfa.swan.ac.uk/Record/cronfa32163 |
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| College: |
Faculty of Science and Engineering |
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