Journal article 784 views
Real-Time Models of Electrostatically Actuated Cantilever Probes With Integrated Thermal Sensor for Nanoscale Interrogation
Journal of Microelectromechanical Systems, Volume: 19, Issue: 1, Pages: 83 - 98
Swansea University Author:
Deepak Sahoo
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DOI (Published version): 10.1109/JMEMS.2009.2037340
Abstract
Real-Time Models of Electrostatically Actuated Cantilever Probes With Integrated Thermal Sensor for Nanoscale Interrogation
Published in: | Journal of Microelectromechanical Systems |
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ISSN: | 1057-7157 1941-0158 |
Published: |
2010
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Online Access: |
Check full text
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URI: | https://cronfa.swan.ac.uk/Record/cronfa32161 |
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College: |
Faculty of Science and Engineering |
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Issue: |
1 |
Start Page: |
83 |
End Page: |
98 |