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Real-Time Models of Electrostatically Actuated Cantilever Probes With Integrated Thermal Sensor for Nanoscale Interrogation / P. Agarwal; D.R. Sahoo; A. Sebastian; H. Pozidis; M.V. Salapaka

Journal of Microelectromechanical Systems, Volume: 19, Issue: 1, Pages: 83 - 98

Swansea University Author: Sahoo, Deepak

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Published in: Journal of Microelectromechanical Systems
ISSN: 1057-7157 1941-0158
Published: 2010
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College: College of Science
Issue: 1
Start Page: 83
End Page: 98