Conference Paper/Proceeding/Abstract 937 views
Modeling and identification of the dynamics of electrostatically actuated Microcantilever with integrated thermal sensor
P. Agarwal,
D. Sahoo,
A. Sebastian,
H. Pozidis,
M.V. Salapaka,
Deepak Sahoo 
Proceedings of the IEEE Conference on Decision and Control
Swansea University Author:
Deepak Sahoo
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DOI (Published version): 10.1109/CDC.2008.4739363
Abstract
Modeling and identification of the dynamics of electrostatically actuated Microcantilever with integrated thermal sensor
| Published in: | Proceedings of the IEEE Conference on Decision and Control |
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| Published: |
2008
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| Online Access: |
http://www.scopus.com/inward/record.url?eid=2-s2.0-62949232012&partnerID=MN8TOARS |
| URI: | https://cronfa.swan.ac.uk/Record/cronfa32165 |
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| College: |
Faculty of Science and Engineering |
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