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Modeling and identification of the dynamics of electrostatically actuated Microcantilever with integrated thermal sensor / P. Agarwal; D. Sahoo; A. Sebastian; H. Pozidis; M.V. Salapaka

Proceedings of the IEEE Conference on Decision and Control

Swansea University Author: Sahoo, Deepak

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DOI (Published version): 10.1109/CDC.2008.4739363

Published in: Proceedings of the IEEE Conference on Decision and Control
Published: 2008
Online Access: http://www.scopus.com/inward/record.url?eid=2-s2.0-62949232012&partnerID=MN8TOARS
URI: https://cronfa.swan.ac.uk/Record/cronfa32165
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College: College of Science