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On intermittent-contact mode sensing using electrostatically-actuated micro-cantilevers with integrated thermal sensors / D.R. Sahoo; W. Häberle; P. Bächtold; A. Sebastian; H. Pozidis; E. Eleftheriou

Proceedings of the American Control Conference

Swansea University Author: Sahoo, Deepak

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DOI (Published version): 10.1109/ACC.2008.4586792

Published in: Proceedings of the American Control Conference
Published: 2008
Online Access: http://www.scopus.com/inward/record.url?eid=2-s2.0-52449087525&partnerID=MN8TOARS
URI: https://cronfa.swan.ac.uk/Record/cronfa32166
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College: College of Science