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Oxygen vacancies and hydrogen in amorphous In-Ga-Zn-O and ZnO

Hongfei Li, Yuzheng Guo Orcid Logo, John Robertson

Physical Review Materials, Volume: 2, Issue: 7

Swansea University Author: Yuzheng Guo Orcid Logo

Abstract

Hydrogen is known to be present as an impurity in amorphous oxide semiconductors at the 0.1% level. The behavior of hydrogen and oxygen vacancies in amorphous In-Ga-Zn-O is studied using density functional supercell calculations. We show that the hydrogens pair up at oxygen vacancies in the amorphou...

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Published in: Physical Review Materials
ISSN: 2475-9953
Published: 2018
Online Access: Check full text

URI: https://cronfa.swan.ac.uk/Record/cronfa40917
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Abstract: Hydrogen is known to be present as an impurity in amorphous oxide semiconductors at the 0.1% level. The behavior of hydrogen and oxygen vacancies in amorphous In-Ga-Zn-O is studied using density functional supercell calculations. We show that the hydrogens pair up at oxygen vacancies in the amorphous network, where they form metal-H-metal bridge bonds. These bonds are shown to create filled defect gap states lying just above the valence band edge, infrared modes at about 1400 and 1520cm−1, and they are shown to give a consistent mechanism to explain the negative bias illumination stress instability found in oxide semiconductors such as In-Ga-Zn-O (IGZO).
College: Faculty of Science and Engineering
Issue: 7