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Chemically amplified molecular resists for e-beam lithography

Richard Palmer Orcid Logo

Swansea University Author: Richard Palmer Orcid Logo

Published: 2007
URI: https://cronfa.swan.ac.uk/Record/cronfa49342
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spelling 2019-03-18T14:32:50.0549403 v2 49342 2019-03-18 Chemically amplified molecular resists for e-beam lithography 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 ACEM Book 31 12 2007 2007-12-31 COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University 2019-03-18T14:32:50.0549403 2019-03-18T14:32:50.0549403 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering Richard Palmer 0000-0001-8728-8083 1
title Chemically amplified molecular resists for e-beam lithography
spellingShingle Chemically amplified molecular resists for e-beam lithography
Richard Palmer
title_short Chemically amplified molecular resists for e-beam lithography
title_full Chemically amplified molecular resists for e-beam lithography
title_fullStr Chemically amplified molecular resists for e-beam lithography
title_full_unstemmed Chemically amplified molecular resists for e-beam lithography
title_sort Chemically amplified molecular resists for e-beam lithography
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 Richard Palmer
format Book
publishDate 2007
institution Swansea University
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 2007-12-31T05:49:28Z
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score 11.08895

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