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Chemically amplified molecular resists for e-beam lithography

F.P. Gibbons, J. Manyam, S. Diegoli, M. Manickam, J.A. Preece, R.E. Palmer, A.P.G. Robinson, Richard Palmer Orcid Logo

Microelectronic Engineering, Volume: 85, Issue: 5-6, Pages: 764 - 767

Swansea University Author: Richard Palmer Orcid Logo

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Published in: Microelectronic Engineering
ISSN: 01679317
Published: 2008
Online Access: Check full text

URI: https://cronfa.swan.ac.uk/Record/cronfa49326
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College: College of Engineering
Issue: 5-6
Start Page: 764
End Page: 767