Journal article 710 views
Chemically amplified molecular resists for e-beam lithography
F.P. Gibbons,
J. Manyam,
S. Diegoli,
M. Manickam,
J.A. Preece,
R.E. Palmer,
A.P.G. Robinson,
Richard Palmer
Microelectronic Engineering, Volume: 85, Issue: 5-6, Pages: 764 - 767
Swansea University Author:
Richard Palmer
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DOI (Published version): 10.1016/j.mee.2007.12.001
Abstract
Chemically amplified molecular resists for e-beam lithography
Published in: | Microelectronic Engineering |
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ISSN: | 01679317 |
Published: |
2008
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URI: | https://cronfa.swan.ac.uk/Record/cronfa49326 |
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2019-03-18T14:32:08.4287609 v2 49326 2019-03-18 Chemically amplified molecular resists for e-beam lithography 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article Microelectronic Engineering 85 5-6 764 767 01679317 31 12 2008 2008-12-31 10.1016/j.mee.2007.12.001 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:32:08.4287609 2019-03-18T14:32:08.1867172 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering F.P. Gibbons 1 J. Manyam 2 S. Diegoli 3 M. Manickam 4 J.A. Preece 5 R.E. Palmer 6 A.P.G. Robinson 7 Richard Palmer 0000-0001-8728-8083 8 |
title |
Chemically amplified molecular resists for e-beam lithography |
spellingShingle |
Chemically amplified molecular resists for e-beam lithography Richard Palmer |
title_short |
Chemically amplified molecular resists for e-beam lithography |
title_full |
Chemically amplified molecular resists for e-beam lithography |
title_fullStr |
Chemically amplified molecular resists for e-beam lithography |
title_full_unstemmed |
Chemically amplified molecular resists for e-beam lithography |
title_sort |
Chemically amplified molecular resists for e-beam lithography |
author_id_str_mv |
6ae369618efc7424d9774377536ea519 |
author_id_fullname_str_mv |
6ae369618efc7424d9774377536ea519_***_Richard Palmer |
author |
Richard Palmer |
author2 |
F.P. Gibbons J. Manyam S. Diegoli M. Manickam J.A. Preece R.E. Palmer A.P.G. Robinson Richard Palmer |
format |
Journal article |
container_title |
Microelectronic Engineering |
container_volume |
85 |
container_issue |
5-6 |
container_start_page |
764 |
publishDate |
2008 |
institution |
Swansea University |
issn |
01679317 |
doi_str_mv |
10.1016/j.mee.2007.12.001 |
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Faculty of Science and Engineering |
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facultyofscienceandengineering |
hierarchy_top_title |
Faculty of Science and Engineering |
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facultyofscienceandengineering |
hierarchy_parent_title |
Faculty of Science and Engineering |
department_str |
School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering |
document_store_str |
0 |
active_str |
0 |
published_date |
2008-12-31T04:00:14Z |
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1763753081796820992 |
score |
11.021648 |