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Ultrathin Fullerene Films as High-Resolution Molecular Resists for Low-Voltage Electron-Beam Lithography

Francis P. Gibbons, Alex P. G. Robinson, Richard E. Palmer, Mayanditheuar Manickam, Jon A. Preece, Richard Palmer Orcid Logo

Small, Volume: 2, Issue: 8-9, Pages: 1003 - 1006

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1002/smll.200500443

Published in: Small
ISSN: 1613-6810 1613-6829
Published: 2006
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URI: https://cronfa.swan.ac.uk/Record/cronfa49363
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College: College of Engineering
Issue: 8-9
Start Page: 1003
End Page: 1006