Book chapter 629 views
New high resolution liquid crystal electron beam resists
Swansea University Author:
Richard Palmer
Abstract
New high resolution liquid crystal electron beam resists
Published: |
2000
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URI: | https://cronfa.swan.ac.uk/Record/cronfa49451 |
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2019-03-18T14:36:29.5240904 v2 49451 2019-03-18 New high resolution liquid crystal electron beam resists 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Book chapter 31 12 2000 2000-12-31 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:36:29.5240904 2019-03-18T14:36:29.5240904 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering Richard Palmer 0000-0001-8728-8083 1 |
title |
New high resolution liquid crystal electron beam resists |
spellingShingle |
New high resolution liquid crystal electron beam resists Richard Palmer |
title_short |
New high resolution liquid crystal electron beam resists |
title_full |
New high resolution liquid crystal electron beam resists |
title_fullStr |
New high resolution liquid crystal electron beam resists |
title_full_unstemmed |
New high resolution liquid crystal electron beam resists |
title_sort |
New high resolution liquid crystal electron beam resists |
author_id_str_mv |
6ae369618efc7424d9774377536ea519 |
author_id_fullname_str_mv |
6ae369618efc7424d9774377536ea519_***_Richard Palmer |
author |
Richard Palmer |
author2 |
Richard Palmer |
format |
Book chapter |
publishDate |
2000 |
institution |
Swansea University |
college_str |
Faculty of Science and Engineering |
hierarchytype |
|
hierarchy_top_id |
facultyofscienceandengineering |
hierarchy_top_title |
Faculty of Science and Engineering |
hierarchy_parent_id |
facultyofscienceandengineering |
hierarchy_parent_title |
Faculty of Science and Engineering |
department_str |
School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering |
document_store_str |
0 |
active_str |
0 |
published_date |
2000-12-31T04:00:28Z |
_version_ |
1763753096798797824 |
score |
11.021648 |