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Reliability Study of MOS Capacitors Fabricated on 3C-SiC/Si Substrates / Fan Li, Song Qiu, Mike Jennings, Phil Mawby

Materials Science Forum, Volume: 1004, Pages: 659 - 664

Swansea University Author: Mike Jennings

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Published in: Materials Science Forum
ISSN: 1662-9752
Published: Trans Tech Publications, Ltd. 2020
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Keywords: 3C-SiC, MOS capacitors, reliability, dielectric breakdown
College: College of Engineering
Start Page: 659
End Page: 664