Integration of HfO[sub 2] on Si/SiC heterojunctions for the gate architecture of SiC power devices
Date first appeared online | |
DOI | 10.1063/1.3462932 |
Authors | Guy O. |
Journal Name | Applied Physics Letters |
Volume | 97 |
Date first appeared online | |
DOI | 10.1063/1.3462932 |
Authors | Guy O. |
Journal Name | Applied Physics Letters |
Volume | 97 |