Si∕SiC Heterojunctions Fabricated by Direct Wafer Bonding
Date first appeared online | 31/12/2008 |
DOI | 10.1149/1.2976158 |
Authors | Guy O. |
Journal Name | Electrochemical and Solid-State Letters |
Volume | 11 |
Date first appeared online | 31/12/2008 |
DOI | 10.1149/1.2976158 |
Authors | Guy O. |
Journal Name | Electrochemical and Solid-State Letters |
Volume | 11 |