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Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC / Owen, Guy

Applied Physics Letters, Volume: 94, Issue: 10, Start page: 103510

Swansea University Author: Owen, Guy

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DOI (Published version): 10.1063/1.3099018

Published in: Applied Physics Letters
Published: 2009
URI: https://cronfa.swan.ac.uk/Record/cronfa19748
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College: College of Engineering
Issue: 10
Start Page: 103510