Journal article 1139 views
Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
A. Pérez-Tomás,
M. Lodzinski,
O. J. Guy,
M. R. Jennings,
M. Placidi,
J. Llobet,
P. M. Gammon,
M. C. Davis,
J. A. Covington,
S. E. Burrows,
P. A. Mawby,
Owen Guy 
Applied Physics Letters, Volume: 94, Issue: 10, Start page: 103510
Swansea University Author:
Owen Guy
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DOI (Published version): 10.1063/1.3099018
Abstract
Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
| Published in: | Applied Physics Letters |
|---|---|
| Published: |
2009
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa19748 |
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| College: |
Faculty of Science and Engineering |
|---|---|
| Issue: |
10 |
| Start Page: |
103510 |