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Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC / A. Pérez-Tomás; M. Lodzinski; O. J. Guy; M. R. Jennings; M. Placidi; J. Llobet; P. M. Gammon; M. C. Davis; J. A. Covington; S. E. Burrows; P. A. Mawby

Applied Physics Letters, Volume: 94, Issue: 10, Start page: 103510

Swansea University Author: Guy, Owen

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DOI (Published version): 10.1063/1.3099018

Published in: Applied Physics Letters
Published: 2009
URI: https://cronfa.swan.ac.uk/Record/cronfa19748
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College: College of Engineering
Issue: 10
Start Page: 103510