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Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC / Owen, Guy

Applied Physics Letters, Volume: 94, Issue: 10, Start page: 103510

Swansea University Author: Owen, Guy

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DOI (Published version): 10.1063/1.3099018

Published in: Applied Physics Letters
Published: 2009
URI: https://cronfa.swan.ac.uk/Record/cronfa19748
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first_indexed 2014-12-13T02:56:46Z
last_indexed 2018-02-09T04:55:39Z
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spelling 2014-12-12T15:11:23.2586598 v2 19748 2014-12-12 Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC c7fa5949b8528e048c5b978005f66794 0000-0002-6449-4033 Owen Guy Owen Guy true false 2014-12-12 SCH Journal Article Applied Physics Letters 94 10 103510 31 12 2009 2009-12-31 10.1063/1.3099018 COLLEGE NANME Chemistry COLLEGE CODE SCH Swansea University 2014-12-12T15:11:23.2586598 2014-12-12T15:11:23.2586598 College of Engineering College level A. Pérez-Tomás 1 M. Lodzinski 2 O. J. Guy 3 M. R. Jennings 4 M. Placidi 5 J. Llobet 6 P. M. Gammon 7 M. C. Davis 8 J. A. Covington 9 S. E. Burrows 10 P. A. Mawby 11 Owen Guy 0000-0002-6449-4033 12
title Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
spellingShingle Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
Owen, Guy
title_short Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
title_full Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
title_fullStr Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
title_full_unstemmed Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
title_sort Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
author_id_str_mv c7fa5949b8528e048c5b978005f66794
author_id_fullname_str_mv c7fa5949b8528e048c5b978005f66794_***_Owen, Guy
author Owen, Guy
format Journal article
container_title Applied Physics Letters
container_volume 94
container_issue 10
container_start_page 103510
publishDate 2009
institution Swansea University
doi_str_mv 10.1063/1.3099018
college_str College of Engineering
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hierarchy_top_id collegeofengineering
hierarchy_top_title College of Engineering
hierarchy_parent_id collegeofengineering
hierarchy_parent_title College of Engineering
department_str College level{{{_:::_}}}College of Engineering{{{_:::_}}}College level
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published_date 2009-12-31T13:35:31Z
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