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Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC

A. Pérez-Tomás, M. Lodzinski, O. J. Guy, M. R. Jennings, M. Placidi, J. Llobet, P. M. Gammon, M. C. Davis, J. A. Covington, S. E. Burrows, P. A. Mawby, Owen Guy Orcid Logo

Applied Physics Letters, Volume: 94, Issue: 10, Start page: 103510

Swansea University Author: Owen Guy Orcid Logo

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DOI (Published version): 10.1063/1.3099018

Published in: Applied Physics Letters
Published: 2009
URI: https://cronfa.swan.ac.uk/Record/cronfa19748
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first_indexed 2014-12-13T02:56:46Z
last_indexed 2018-02-09T04:55:39Z
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spelling 2014-12-12T15:11:23.2586598 v2 19748 2014-12-12 Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC c7fa5949b8528e048c5b978005f66794 0000-0002-6449-4033 Owen Guy Owen Guy true false 2014-12-12 CHEM Journal Article Applied Physics Letters 94 10 103510 31 12 2009 2009-12-31 10.1063/1.3099018 COLLEGE NANME Chemistry COLLEGE CODE CHEM Swansea University 2014-12-12T15:11:23.2586598 2014-12-12T15:11:23.2586598 Faculty of Science and Engineering School of Engineering and Applied Sciences - Chemistry A. Pérez-Tomás 1 M. Lodzinski 2 O. J. Guy 3 M. R. Jennings 4 M. Placidi 5 J. Llobet 6 P. M. Gammon 7 M. C. Davis 8 J. A. Covington 9 S. E. Burrows 10 P. A. Mawby 11 Owen Guy 0000-0002-6449-4033 12
title Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
spellingShingle Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
Owen Guy
title_short Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
title_full Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
title_fullStr Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
title_full_unstemmed Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
title_sort Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
author_id_str_mv c7fa5949b8528e048c5b978005f66794
author_id_fullname_str_mv c7fa5949b8528e048c5b978005f66794_***_Owen Guy
author Owen Guy
author2 A. Pérez-Tomás
M. Lodzinski
O. J. Guy
M. R. Jennings
M. Placidi
J. Llobet
P. M. Gammon
M. C. Davis
J. A. Covington
S. E. Burrows
P. A. Mawby
Owen Guy
format Journal article
container_title Applied Physics Letters
container_volume 94
container_issue 10
container_start_page 103510
publishDate 2009
institution Swansea University
doi_str_mv 10.1063/1.3099018
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Engineering and Applied Sciences - Chemistry{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Engineering and Applied Sciences - Chemistry
document_store_str 0
active_str 0
published_date 2009-12-31T03:23:15Z
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