Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
| Date first appeared online | 31/12/2009 |
| DOI | 10.1063/1.3099018 |
| Authors | Guy O. |
| Journal Name | Applied Physics Letters |
| Volume | 94 |
| Date first appeared online | 31/12/2009 |
| DOI | 10.1063/1.3099018 |
| Authors | Guy O. |
| Journal Name | Applied Physics Letters |
| Volume | 94 |