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Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC

A Pérez-Tomás, M Lodzinski, O. J Guy, M. R Jennings, M Placidi, J Llobet, P. M Gammon, M. C Davis, J. A Covington, S. E Burrows, P. A Mawby, Owen Guy Orcid Logo

Applied Physics Letters, Volume: 94, Issue: 10, Start page: 103510

Swansea University Author: Owen Guy Orcid Logo

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DOI (Published version): 10.1063/1.3099018

Published in: Applied Physics Letters
ISSN: 0003-6951
Published: 2009
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Item Description: This project developed a MEMS-based electro-osmotic pump originally for application in heat-transfer in semiconductor chips. An applied voltage pumped an ionic solution through a series of microfulidic channels resulting in a cooling effect on the semiconductor wafer and spreading heat from localised device hot-spots.The technology is now being developed for biochip applications, pumping tiny volumes of fluids to biochip sensors.It has lead to industrial interaction with etch tool manufacturer SPTS and a resulting 3-year £176k project.This is a key eneabling technology for many of the nanohealth developments at Swansea.
College: Faculty of Science and Engineering
Issue: 10
Start Page: 103510