Journal article 1080 views
Statistical study of the influence of LER and MGG in SOI MOSFET
Semiconductor Science and Technology, Volume: 29, Issue: 4, Start page: 045005
Swansea University Author:
Karol Kalna
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DOI (Published version): 10.1088/0268-1242/29/4/045005
Abstract
Statistical study of the influence of LER and MGG in SOI MOSFET
Published in: | Semiconductor Science and Technology |
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Published: |
2014
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URI: | https://cronfa.swan.ac.uk/Record/cronfa21851 |
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College: |
Faculty of Science and Engineering |
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Issue: |
4 |
Start Page: |
045005 |