Statistical study of the influence of LER and MGG in SOI MOSFET
Date first appeared online | |
DOI | 10.1088/0268-1242/29/4/045005 |
Authors | Kalna K. |
Journal Name | Semiconductor Science and Technology |
Volume | 29 |
Date first appeared online | |
DOI | 10.1088/0268-1242/29/4/045005 |
Authors | Kalna K. |
Journal Name | Semiconductor Science and Technology |
Volume | 29 |